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如何測試 CMOS 閘極介電層的可靠性
利用時間零點介電擊穿(TZDB)、時間依賴性介電擊穿(TZDB)、V-Ramp 及 J-Ramp 測量方法,來表徵 CMOS 閘極介電層的可靠性,並據此評估其介電擊穿行為。
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