The Keysight 10897C VMEbus laser axis board offers the highest measurement resolution commercially available in positioning systems. With resolution up to 0.3 nm, it provides ultra-precise position (or distance) information for advanced products such as IC fabrication equipment. The Keysight 10897C is tested at frequencies equivalent to 0.7 m/s plane mirror slew rates.
The register-programmed position axis board provides a 36-bit position word in fractional wavelengths. The word is readable over the VMEbus and is also available from a real-time hardware output on the A and C rows of the P2 connector. Its very high data rates accommodate high-bandwidth, high-performance closed-loop applications. Configured with appropriate laser and optics components, the Keysight 10897C supplies unsurpassed positioning accuracy for dynamic measurements.
VMEbus Position Output
Units: fractions of a wavelength
2's Complement: choose any 32 of 35 bits to read
Data Rate Over Backplane: >100 kHz
Sample Data Age:
Fixed: After a synchronous sample operation, the value in the position register will reflect the actual position that occurred approximately X ns before the sample operation was initiated. There are two user-selectable values of X, 290 ns and 790 ns.
The position register may be read 100 ns or 600 ns after a hardware sample operation, via the sample delay register bit.
P2 Connector Hardware Position Output
Fixed: The data on the hardware output line will reflect the position that occurred approximately 1.2 us before the next rising edge of the 10 MHz clock.
A16 Data Transfer Cycles
D16 Data Transfer Cycles
A24 Data Transfer Cycles
D32 Data Transfer Cycles
D08(O) Interrupt Acknowledge Cycles
5 Vdc + 0.25 V/-0.125 V at less than 3.5 A
+12 V +/-0.5 V at less than 0.1A
-12 V +/-0.5V at less than 0.025A
19 linear meters (60 linear feet) per minute for 0-40 degrees C operation 76 linear meters (250 linear feet) per minute minimum for 0-55 degrees C operation
Reduced data age ambiguity ensures dynamic accuracy
Low noise rating improves repeatability
Full electrical and mechanical compliance with VMEbus specifications
Programmable signal routing
High reliability backed by three-year warranty
Integrated board functions reduce system size, complexity, development time, and cost