HIGHLIGHTS

General

  • One measurement channel per board
  • Maximum 7 boards per system
  • 36-bit 2's complement
  • Resolution up to 0.3 nm with high resolution optics
  • Linear interferometer balanced velocity at 5.8 MHz split: 1.75 m/s

Operation with Plane Mirror Optics

  • Resolution: 0.6 nm
  • Working range: ± 10.6 m

Timing

  • Position update rate: 10 MHz
  • Data rate over backplane: > 100 kHz
  • Multi-board sync : ± 2 ns

The 10897D High-resolution VMEbus laser axis board provides excellent resolution of up to 0.3 nm with a high resolution interferometer. The data age uncertainty is dramatically reduced allowing extremely accurate measurement and control of moving systems.

The very high data rates accommodate high-bandwidth and high-performance closed-loop applications. Configured with appropriate lasers and optics components, the 10897D supplies unsurpassed positioning accuracy for dynamic measurement.

KEY SPECIFICATIONS

Bus
VME
Max Data rate for direct hardware outputs (kHz)
10000
Max Data rate over bus (kHz)
100
Number of Axes per board
1
Plane Mirror (PM) Resolution (nm)
0.6
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
± 790*
Bus
Max Data rate for direct hardware outputs (kHz)
Max Data rate over bus (kHz)
Number of Axes per board
Plane Mirror (PM) Resolution (nm)
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
VME
10000
100
1
0.6
± 790*
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Bus:
VME
Max Data rate for direct hardware outputs (kHz):
10000
Max Data rate over bus (kHz):
100
Number of Axes per board:
1
Plane Mirror (PM) Resolution (nm):
0.6
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability:
± 790*

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