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10897C High-Resolution VMEbus Laser Axis Board

Produkt Status

Obsolete

Technische Unterstützung

Kalibrierung und Reparatur

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Ersatzprodukt

10897D High-Resolution VMEbus Laser Axis Board

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HIGHLIGHTS

The Keysight 10897C VMEbus laser axis board offers the highest measurement resolution commercially available in positioning systems. With resolution up to 0.3 nm, it provides ultra-precise position (or distance) information for advanced products such as IC fabrication equipment. The Keysight 10897C is tested at frequencies equivalent to 0.7 m/s plane mirror slew rates.

The register-programmed position axis board provides a 36-bit position word in fractional wavelengths. The word is readable over the VMEbus and is also available from a real-time hardware output on the A and C rows of the P2 connector. Its very high data rates accommodate high-bandwidth, high-performance closed-loop applications. Configured with appropriate laser and optics components, the Keysight 10897C supplies unsurpassed positioning accuracy for dynamic measurements.

VMEbus Position Output
Data Format:
Units: fractions of a wavelength
2's Complement: choose any 32 of 35 bits to read
Positive Logic
Data Rate Over Backplane: >100 kHz
Sample Data Age:
Fixed: After a synchronous sample operation, the value in the position register will reflect the actual position that occurred approximately X ns before the sample operation was initiated. There are two user-selectable values of X, 290 ns and 790 ns.
Sample Delay:
The position register may be read 100 ns or 600 ns after a hardware sample operation, via the sample delay register bit.
P2 Connector Hardware Position Output
Data Age:
Fixed: The data on the hardware output line will reflect the position that occurred approximately 1.2 us before the next rising edge of the 10 MHz clock.
General Information
VME Compliance:
A16 Data Transfer Cycles
D16 Data Transfer Cycles
A24 Data Transfer Cycles
D32 Data Transfer Cycles
D08(O) Interrupt Acknowledge Cycles
Power Requirements:
5 Vdc + 0.25 V/-0.125 V at less than 3.5 A
+12 V +/-0.5 V at less than 0.1A
-12 V +/-0.5V at less than 0.025A
Cooling Requirements:
19 linear meters (60 linear feet) per minute for 0-40 degrees C operation 76 linear meters (250 linear feet) per minute minimum for 0-55 degrees C operation
Reduced data age ambiguity ensures dynamic accuracy
Low noise rating improves repeatability
Full electrical and mechanical compliance with VMEbus specifications
Programmable signal routing
High reliability backed by three-year warranty
Integrated board functions reduce system size, complexity, development time, and cost

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