HIGHLIGHTS

一般

  • 平台與大小:PC-PCI,98 x 312 mm
  • 經由電路板的軸數: 3
  • 解析度擴充:x512
  • 外部取樣與資料保持輸入: 0 + 3

可使用平面鏡光學元件操作

  • 解析度:0.31 nm
  • 最快速度 (也受到雷射頭限制) :2800 mm/sec

時序

  • 位置資料更新率:20 MHz
  • 非同步資料保持不確定度:± 25 ns (相對於 OCLK )
  • 同步資料保持不確定度:± 1 ns (相對於 LCLK )

特殊功能

  • 簡易程式設計 API (Windows NT4/2000/XP)
  • Delta Tau 的 PMAC/UMAC 伺服系統之介面

KEY SPECIFICATIONS

Bus
PC-PCI (33MHz) PCI local bus spec rev 2.2
Max Data rate for direct hardware outputs (kHz)
4000
Max Data rate over bus (kHz)
400 (I/O capability of board if reading one axis, ignoring SW and HW delay of controller)
Number of Axes per board
3
Plane Mirror (PM) Resolution (nm)
0.3
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
± 1107*
Bus
Max Data rate for direct hardware outputs (kHz)
Max Data rate over bus (kHz)
Number of Axes per board
Plane Mirror (PM) Resolution (nm)
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
PC-PCI (33MHz) PCI local bus spec rev 2.2
4000
400 (I/O capability of board if reading one axis, ignoring SW and HW delay of controller)
3
0.3
± 1107*
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Bus:
PC-PCI (33MHz) PCI local bus spec rev 2.2
Max Data rate for direct hardware outputs (kHz):
4000
Max Data rate over bus (kHz):
400 (I/O capability of board if reading one axis, ignoring SW and HW delay of controller)
Number of Axes per board:
3
Plane Mirror (PM) Resolution (nm):
0.3
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability:
± 1107*

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