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The Scanning Microwave Microscope (SMM) merges the nanoscale imaging capabilities of an atomic force microscope (AFM) with the high-frequency broadband (from MHz to GHz) impedance measurement accuracy of a vector network analyzer (VNA) (Figure 1). The typical frequency range of the combined SMM is between 1-20 GHz (Huber et al. 2010). It allows characterizing electric, dielectric, and magnetic properties of materials at microwave frequencies with nanometer lateral resolution. Using the microwave signal, impedance nanoscale imaging and doping profiling can be performed. Typically the SMM is operated in reflection mode, whereby the ratio of the reflected and incident electromagnetic waves, the so called S11 scattering parameter, is measured by the VNA at each pixel of the AFM tip-sample contact point.
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