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Introduction
As device geometry scales down, low current must be precisely measured to characterize the new generation semiconductor devices and processes.
This application note introduces Keysight Technolgies, Inc. new solution for precise characterization of multiple semiconductor devices by switching.
Problems of Today’s Semiconductor Evaluation
With the Keysight 4156C Precision Parameter Analyzer, you can measure low current with 1 fA resolution and 20 fA offset. Its unprecedented accuracy and functionality enable you to characterize your sub-micron geometry devices accurately.
To improve productivity, it is required to switch multiple devices to automate test. However, there has been no low cost switching matrix with low enough leakage current to keep the performance of the parameter analyzer.
New System Solution from Keysight Now you can configure a device characterization system by using the Keysight E5250A Low Leakage Switch Mainframe.
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