Highlights

General

  • Maximum velocity with linear optics: 711 mm/s
  • Reference frequency: 2.4 to 3.0 MHz
  • Weight: 3.4 kg (7.5 lb)
  • Warm up time: 90 minutes

Laser beam

  • Diameter: 6 mm; Option 003: 3mm; Option 009: 9 mm
  • Minimum output power: 180 µW; Option H03: 300 µW; Option H05: 240 µW; Option H07: 400 µW
  • Maximum output power: 1 mW
  • Beam height: 79.5 ± 1.0 mm

Input power requirement

  • +15 V ± 0.3 V at 3.0 A maximum
  • -15 V ± 0.3 V at 0.3 A maximum

The primary uses for the Keysight 5517C include VME- and PC-based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Option 009 allows a larger angular range of measurement by providing a 9-mm beam diameter for use with three-axis interferometers. Please contact Keysight for custom requirements.

Principais especificações

Aplicações
VME
PC
Keysight 5572A system
Keysight 5501A system
Beam height (mm)
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
696
Output Power Higher Power Option Available �w:CX_Number
> 180
Reference frequency (MHz)
2.4 to 3.0
Velocity
700 mm/s
Aplicações
Beam height (mm)
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
Output Power Higher Power Option Available �w:CX_Number
Reference frequency (MHz)
Velocity
VME
PC
Keysight 5572A system
Keysight 5501A system
79.5
696
> 180
2.4 to 3.0
700 mm/s
Visualizar mais
Aplicações:
VME
PC
Keysight 5572A system
Keysight 5501A system
Beam height (mm):
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used:
696
Output Power Higher Power Option Available �w:CX_Number:
> 180
Reference frequency (MHz):
2.4 to 3.0
Velocity:
700 mm/s
Warm-up time* if fan is connect to vent body (min):
90
5517C Series Laser Heads Keysight

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