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500 kSa/s, 100 pA/10 pA, 30 V, 500 mA
Introduction
The Keysight M9614A and M9615A is a PXIe five-channel precision source / measure units (SMUs). These SMUs supports accurate measurements up to 30 V / 500 mA with resolution down to 6 μV / 10 pA. The M9614A and M9615A are suitable for applications that requires high channel density, such as semiconductor reliability testing and integrated circuit (IC) tests.
This table shows an overview of the M9614A and M9615A, the product options and its associated accessories. This guide provides a step-by-step instruction to help you configure to meet the desired test requirements.
|
Model Number |
M9614A |
PXIe 5-channel SMU, 500 kSa/s, 100 pA, 30 V, 500 mA |
M9615A |
PXIe 5-channel precision SMU, 500 kSa/s, 10 pA, 30 V, 500 mA |
|
Accessories |
PX0106A |
Dsub25-to-5 SMB adapter for M9614/15 |
PX0107A |
Low noise filter adapter for M9614/15 |
PX0108A-001/002 |
BNC-to-SMB cable, 1.5 m/3 m |
N1254A-106 |
Triaxial(m) to BNC(f) adaptor |
PX0101A-001/002 |
BNC-to-ferrule terminal cable, 1.5 m/ 3 m |
|
Options |
1A7 |
Calibration + uncertainties + guardbanding (not accredited) |
A6J |
ANSI Z540-1-1994 calibration |
UK6 |
Commercial calibration certificate with test data |
Configure Your Keysight M9614A/M9615A 5-channel Precision SMU
Step 1. Define the required number of M9614A/M9615A modules
You need to define the required number of modules based on your application requirements.
Product Number |
Required Slots |
Number of Channels |
Max. Voltage |
Max. Current |
Min. Voltage Resolution |
Min. Current Resolution |
Max. Sampling Rate |
M9614A |
1 |
5 |
30 V |
500 mA |
6 μV |
100 pA |
500 kSa/s |
|
|
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M9615A |
|
|
|
|
|
10 pA |
|
The following items comes as standard with each M9614A/M9615A PXIe precision SMU module:
|
Qty. |
Additional information |
Quick startup poster |
1ea |
Printed reference for quick startup (English) |
Certificate of calibration (without test data) |
1ea |
Certificate of calibration (without actual test data). If you need the test data, please specify option UK6. |
Short bar |
1ea |
Short bar to connect low terminals to chassis common; orderable part number is M9601-87001 (includes 5 qty.) |
Connector-terminal block 2.5 mm 5-terminal |
1ea |
Connector-terminal block to connect external trigger terminals and interlock terminal; orderable part number is M9615-87001 (includes 5 qty.) |
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