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應用說明
Atomic force microscopy (AFM) was developed as a high resolution surface imaging technique, capable of imaging and probing material structures at the atomic or molecular level. The capability of obtaining high resolution images with ease on different materials, using various imaging methods such as contact and AC mode, has become expected for high performance scanning probe microscopy (SPM) systems. On the other hand, the multitude of SPM applications have also become more demanding in accurate positioning and correct dimensional measurement. Consequently, a large range scanner (greater than 90µm) and closed-loop control has also become a standard requirement for advanced SPM systems. As a result, the integration of a large scan area with accurate closed-loop control and the capability of high resolution imaging becomes the key design challenge. Here we present a couple of application examples that demonstrate the high resolution performance of the Keysight Technologies, Inc. 7500 AFM system.
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