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應用說明
Description of Single-Pass Kelvin Force Microscopy Measurements
Currently, the expansion of AFM applications is governed by a multifrequency detection of mechanical and electric tip-sample force interactions. In studies of local electric properties, these advances are related to single-pass Kelvin force microscopy (KFM) that can be implemented in different frequencies set-ups. For the past couple of years we have explored various single-pass KFM implementations, which are schematically shown in Figure 1.
This diagram illustrates that a combined detection of the mechanical and electric tip-sample interactions can be realized with amplitude modulation (AM) and frequency modulation modes (FM). Most of the experiments so far were conducted with the AM detection of the tip-sample forces that are used for topography profiling at the resonant frequency of the probe. Simultaneously with the topography measurements the electrostatic force interactions between the conducting probe and the sample are stimulated with AC voltage applied to the probe at much lower frequency. These electrostatic forces are measured with the AM or FM detection and their nullifi-cation with DC voltage in the KFM servo operation provide the quantitative surface potential data. Recently we have started using AFM measurements with FM servo for topography profiling and two related KFM modes: FM-AM and FM-FM are currently under scrutiny.
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