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5517GL Laser Head
키사이트 5517GL은 주로 반도체 리소그래피 및 평판 분야와 같이 모션 속도가 더 빠른 VME 및 PC 기반 레이저 간섭계 시스템에 사용됩니다.
HIGHLIGHTS
General
- Maximum velocity with linear optics: 2.1 m/s
- Reference frequency: >= 7.2 MHz
- Weight: 3.2 kg (7 lb)
- Warm up time: 45 minutes if fan and exhaust connected to the vented cover
Laser Beam
- Diameter: option009 9 mm (5517GL must be ordered with option 009)
- Minimum output power: 168 µW (120 µW after 3 years)
- Maximum output power: 1 mW
- Beam height: 80.8 ± 1.0 mm
Input Power Requirement
- +15 V ± 0.3 V at 2.2 A maximum
- -15 V ± 0.3 V at 0.03 A maximum
The Keysight 5517GL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.
Learn more about Laser Interferometer Position Measurement Systems
주요 사양
Beam height (mm)
80.8
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
2215**
Output Power Higher Power Option Available �w:CX_Number
> 168
Reference frequency (MHz)
>= 7.2
Warm-up time* if fan is connect to vent body (min)
90 (*45)
Beam height (mm)
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
Output Power Higher Power Option Available �w:CX_Number
Reference frequency (MHz)
Warm-up time* if fan is connect to vent body (min)
80.8
2215**
> 168
>= 7.2
90 (*45)
더 보기
Beam height (mm):
80.8
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used:
2215**
Output Power Higher Power Option Available �w:CX_Number:
> 168
Reference frequency (MHz):
>= 7.2
Warm-up time* if fan is connect to vent body (min):
90 (*45)
5517GL에 관심이 있으신가요?
레이저 헤드의 역량 확대
특집 리소스: 5517GL 레이저 헤드
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