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5517GL Laser Head
The Keysight 5517GL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.
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General
- Maximum velocity with linear optics: 2.1 m/s
- Reference frequency: >= 7.2 MHz
- Weight: 3.2 kg (7 lb)
- Warm up time: 45 minutes if fan and exhaust connected to the vented cover
Laser Beam
- Diameter: option009 9 mm (5517GL must be ordered with option 009)
- Minimum output power: 168 µW (120 µW after 3 years)
- Maximum output power: 1 mW
- Beam height: 80.8 ± 1.0 mm
Input Power Requirement
- +15 V ± 0.3 V at 2.2 A maximum
- -15 V ± 0.3 V at 0.03 A maximum
The Keysight 5517GL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.
Learn more about Laser Interferometer Position Measurement Systems
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