How to Improve On-Wafer CV Accuracy

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Parameter Analyzer
+ Parameter Analyzer
Parameter Analyzer
+ Parameter Analyzer

Improve On-Wafer CV Accuracy

On-wafer capacitance-voltage measurements require careful management of probe connections, cable impedance, and wafer chuck effects to obtain repeatable device characteristics. The setup combines capacitance and current-voltage measurements while maintaining stable signal routing and minimizing parasitic effects.

Accurate measurements depend on open, short, and optional load compensation together with optimized test frequency, signal level, integration time, and cable length. Proper low-terminal routing and return-path implementation reduce leakage, noise, and residual errors during semiconductor device characterization.

On-Wafer CV Accuracy Solution

Accurate CV and IV characterization requires stable four-terminal connections, a controlled current return path, and compensation for residual cable impedance and stray admittance. The Keysight Semiconductor Device Analyzer combines source/measure and capacitance measurement capabilities in a single platform, with automated switching between CV and IV paths, support for shielded two-terminal configurations, and open/short/load compensation for improved measurement accuracy. Its graphical application setup simplifies parameter entry and result display, while the 1 kHz to 5 MHz capacitance measurement range supports a wide variety of device and material characterization workflows.
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