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Highlights
- Measurement range: for linear is 1 m, and for pitch and yaw is +/- 250 urad
- Beam diameter is 3 mm1/e
- Optical Resolution is λ/4 with plane mirror
- Nonlinearity error is low as 1.0 nm or less
- Mechanical resonance frequency is 1300 Hz or more
- Thermal drift is low as 10 nm/°C or less
The Keysight E1728A 3-axis compact Interferometer measures stage position, linear movement and pitch relative to the reference mirror on top of the stage and designed to meet the pointing stability requirements of modern laser metrology systems. The E1728A features the beam steering fuction that aligns the top axis beam to the reference mirror independentlry from the bottom two axes, which are aligned with the stage mirror. The E1728A incorporates integral remote sensors with ST connectors, eliminating the need for separately mounted remote sensors. Plastic or glass optical fiber with mating ST connectors are available from Keysight in a variety of fiber lengths.
In addition, the Keysight E1728A offers flexibility in setting the input beam direction using an attached input beam bending mirror. This allows input beam to be direction from either right or left to the measurement (output) beams. By removing the input bending mirror, the input beam can be aligned straight with the measurement beams.
Learn more about Laser Interferometer Position Measurement Systems
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