Compact Low Voltage FE-SEM in MEMS Analysis
Publication Number: 5990-9276EN
Publication Date: 2015.03.11
Language: English
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Compact Low Voltage FE-SEM in MEMS Analysis

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MEMS (microelectromechanical systems) are considered to be part of semiconductor micro technology. MEMS are important as accelerometers in cell phones, PDAs, and motion sensitive video game controllers. MEMS have played an increasingly larger role in the “sensory intelligence” of everyday devices from clothes washers and dryers to airbag deployment in automobiles to ink-jet printers.