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All-in-one, comprehensive semiconductor device characterization
Keysight parameter analyzers provide comprehensive semiconductor device characterization in a single, integrated platform. Combining precision current-voltage (IV) and capacitance-voltage (CV) testing, pulsed measurements, and reliability testing, these modular systems support a wide range of devices from advanced materials to high-power components. With industry-leading measurement accuracy, flexible configuration options, and intuitive software control, Keysight parameter analyzers help accelerate device research, development, and qualification. Request a quote or order one of our popular configurations today. Need help selecting? Check out the resources below.
Flexible modular design
Configure your analyzer with up to 10 interchangeable modules to match a wide range of test needs, including SMUs, CV meters, waveform generators, and switch matrices.
Full-range measurements
Accurately characterize devices from sub-femtoamp leakage up to kilovolt power switching, supporting everything from low-power research to advanced power semiconductor testing.
Future-ready scalability
Easily upgrade as requirements grow by adding higher power modules, pulse measurement units, or switching capabilities to expand test coverage without system replacement.
Integrated test software
Simplify test setup and analysis with a graphical interface that includes pre-built test libraries, real-time plotting, and advanced data comparison tools.
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Maximum output current
1 A DC / 3 A pulse to 2 A DC / 40 A pulse
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Minimum current measurement resolution
0.1 fA to 10 fA
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Number of channels
5 to 10
Most popular configurations
Semiconductor Device Parameter Analyzer / Semiconductor Characterization System Mainframe
Power Device Analyzer / Curve Tracer
Pre-configured Power Device Analyzer / Curve Tracer (B1505A with modules and fixture)
Services and support
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Ensure your test system performs to specification and meets local and global standards.
Make measurements quickly with in-house, instructor-led training, and eLearning.
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Frequently asked questions
A parameter analyzer is an integrated, modular test system that consolidates multiple semiconductor measurement functions, including current-voltage (IV), capacitance-voltage (CV), pulse, and switching, into a single chassis. Unlike standalone SMUs or piecemeal instrument setups, parameter analyzers offer tightly synchronized, multi-domain measurements with built-in timing, automation, and analysis software. They are optimized for semiconductor device characterization, offering high-resolution source/measure capabilities from femtoamps to kilovolts and amps, all within a flexible test architecture. Their key advantage lies in system-level coherence, ease of configuration, and scalability, enabling faster test development, consistent timing across instruments, and seamless measurement of both basic and complex device structures without external synchronization or manual integration.
Parameter analyzers are widely used in R&D, modeling, and reliability testing of semiconductor devices across a variety of technologies. They are ideal for characterizing discrete devices (e.g., diodes, MOSFETs, BJTs), advanced transistors (e.g., FinFETs, HEMTs), power components (e.g., IGBTs, SiC/GaN FETs), and novel materials like organic semiconductors, 2D layers, or resistive memory cells. Due to their ultra-wide measurement range, parameter analyzers are suited for everything from measuring ultra-low leakage currents in gate dielectrics to evaluating breakdown characteristics of high-voltage devices under pulsed or continuous bias. They are also effective for circuit-level testing, modeling parameter extraction (e.g., Id-Vg, Id-Vd, gm, Ron), and electrostatic discharge (ESD) robustness studies. Academic labs, semiconductor foundries, and device manufacturers rely on them to ensure comprehensive validation throughout the design-to-production lifecycle.
Parameter analyzers support up to ten measurement modules that users can configure based on their specific application. These modules can include precision SMUs, high-voltage or high-current SMUs, capacitance measurement units (CMUs), fast pulsing modules (WGFMUs), switching matrices, and more. This modularity enables users to tailor the system for multi-terminal devices, combine IV and CV tests within one sweep, or run automated sequences involving voltage stress, temperature variation, or time-dependent breakdown tests. Modules can be added, upgraded, or replaced without overhauling the entire system, making it future-proof and adaptable to new device types or methodologies. This design also supports synchronized triggering, real-time control, and internal routing that reduces wiring complexity and minimizes parasitic errors.
Parameter analyzers offer a variety of advanced electrical characterization techniques, tightly integrated within a single test environment. These include:
- Quasi-static IV and CV measurements: For threshold voltage, subthreshold swing, on/off current ratio, gate leakage, junction capacitance, and body effect studies.
- Pulsed IV testing: Minimizes self-heating and charge trapping effects for devices under high power or high speed switching.
- Capacitance-voltage (CV) profiling: Extracts doping profiles, oxide thickness, and interface states using low-frequency and high-frequency CV methods.
- Stress and reliability testing: Supports tests like NBTI, HCI, TDDB, and SILC through long-duration biasing and timed sweeps with logging.
- Temperature-dependent analysis: Interfaces with thermal chucks or chambers for variable temperature characterization.
- Embedded analysis tools: Real-time plotting, parameter extraction templates (e.g., gmmax, Vth shift, Rds(on)), pass/fail comparisons, and scripting APIs (e.g., Python, SCPI) enable repeatable test automation and analysis workflows without external software.
The choice of parameter analyzer depends heavily on the target voltage, current, and measurement accuracy required by the application. For low-power devices, such as analog ICs, advanced CMOS, or sensors, a standard parameter analyzer equipped with precision low-current SMUs (down to 0.1 fA resolution) and CMUs is ideal. These systems offer the sensitivity and stability needed for leakage current and subthreshold behavior analysis. In contrast, high-power devices like SiC and GaN power MOSFETs or IGBTs require analyzers which support sourcing up to 3000 V and 1500 A. These analyzers include specialized power SMUs with compliance protection, high-speed measurement for transient response, and safety features to protect both the operator and the DUT. Engineers should also consider:
- pulse width and rise time capabilities for minimizing thermal effects,
- guarding and shielding design for high-voltage measurements,
- thermal dissipation requirements of the DUT,
- integration with switching matrices or wafer probers, and
- test throughput and automation interface if used in high-volume environments.