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Multiple Axis Interferometers
Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.
Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.
Learn more about Laser Interferometer Position Measurement Systems
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The Keysight 10735A three axis interferometer is used in multiple axis applications where linear and angular control of the stage is required.
The Keysight E1715A 3-Axis Compact Interferometer employs Keysight’s advanced monolithic optics design technology to meet the low nonlinearity error requirements of modern laser metrology systems.
The Keysight 10721A two axis differential interferometer, when used in multiple axis applications, simultaneously makes two differential measurements.
The Keysight 10736A three axis interferometer is used in multiple axis applications where linear and angular control of the stage is required.
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