How to Perform Combined IV and CV Characterization

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Automate IV and CV Characterization

Semiconductor device characterization frequently requires both current-voltage (IV) and capacitance-voltage (CV) measurements on the same device while it remains on the wafer. The measurement system must support precision current and voltage sourcing together with multifrequency capacitance measurements, while maintaining stable cable connections, minimizing parasitic effects, and performing accurate compensation for residual measurement errors.

The measurement process combines SMU CMU Unify Unit (SCUU), a Multi-Frequency Capacitance Measurement Unit (MFCMU), and automated switching hardware so that IV and CV measurements can be executed without reconnecting measurement cables. Built-in compensation routines and automated measurement sequencing enable repeatable characterization while preserving measurement accuracy across multiple wafer test sites.

Automated IV CV Characterization Solution

Combined IV and CV characterization requires a measurement platform capable of switching seamlessly between precision current-voltage and capacitance-voltage measurements while maintaining a stable probing configuration. The solution integrates the Keysight Semiconductor Device Analyzer with the Multi-Frequency Capacitance Measurement Unit (MFCMU), Source Monitor Units (SMUs), the SMU CMU Unify Unit (SCUU), and the Guard Switch Unit (GSWU) to automate measurement routing without requiring manual cable changes. EasyEXPERT software manages IV/CV switching, open/short compensation, optional load compensation, and automated test execution. The SCUU also extends DC bias capability for capacitance measurements up to ±100 V using connected SMUs while maintaining accurate and repeatable semiconductor device characterization.

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How to Perform Combined IV and CV Characterization Block Diagram

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