The Keysight 10706A Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. The unique contribution of the 10706A is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.
The 10706A includes two retroreflectors (one for the reference and the other for manipulating the beam path) and one quarter wave plate. For X-Y stage applications, the user must provide the mirror(s). For single-axis applications, the 10724A Plane Mirror Reflector may be used.
The 10706A can be used to bend the beam by interchanging the reference retroreflector and the quarter wave plate. The 10706A cannot be used as the moving component.
Differential operation requires replacing the reference retroreflector with a 10722A Plane Mirror Converter and attaching the reference plane mirror to the reference surface of interest.
The 10706A can be converted to a 10706B High Stability Plane Mirror Interferometer by using a 10723A High Stability Adapter. The 10706B is an exact functional equivalent of the 10706A, but with better thermal stability.
- Application: Plane mirror
- Distinguishing Feature: Plane mirror reflector
- # of Axis: 1
- Maximum Beam Size: 6 mm
- Beam Separation: 12.7 mm (0.5 in)
- Weight: 308 g (10.9 oz)
- Fundamental Optical Resolution: λ/4 (158.2 nm, 6.2 µin)
- System Resolution: λ/128 (5 nm, 0.2 µin) based on using 32x electronic resolution extension
- System Resolution: λ/1024 (0.62 nm, 0.024 µin) based on using 256x electronic resolution extension
- Reflector: 10724A or user supplied
- Mount Used: 10711A
- Referenced: No
- Turned Configuration: Yes, by interchanging parts
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