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5517EL Laser Head
The Keysight 5517EL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.
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Highlights
General
- Maximum velocity with linear optics: 1.55 m/s
- Reference frequency: >= 5.8 MHz
- Weight: 3.2 kg (7 lb)
- Warm up time: 45 minutes if fan and exhaust connected to the vented cover
Laser Beam
- Diameter: 6 mm
- Minimum output power: 65 µW (50 µW after 3 years)
- Maximum output power: 220 µW
- Beam height: 80.8 ± 1.0 mm
Input Power Requirement
- +15 V ± 0.3 V at 2.2 A maximum
- -15 V ± 0.3 V at 0.03 A maximum
The Keysight 5517EL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.
Learn more about Laser Interferometer Position Measurement Systems
Key Specifications
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