Highlights

General

  • Maximum velocity with linear optics: 1.55 m/s
  • Reference frequency: >= 5.8 MHz
  • Weight: 3.2 kg (7 lb)
  • Warm up time: 45 minutes if fan and exhaust connected to the vented cover

Laser Beam

  • Diameter: 6 mm
  • Minimum output power: 65 µW (50 µW after 3 years)
  • Maximum output power: 220 µW
  • Beam height: 80.8 ± 1.0 mm

Input Power Requirement

  • +15 V ± 0.3 V at 2.2 A maximum
  • -15 V ± 0.3 V at 0.03 A maximum

The Keysight 5517EL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.

Learn more about Laser Interferometer Position Measurement Systems

KEY SPECIFICATIONS

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