Highlights

General

  • Maximum velocity with linear optics: 1.2 m/s
  • Reference frequency: >= 4.4 MHz; option 300: 5 MHz available
  • Weight: 3.2 kg (7 lb)
  • Warm up time: 45 minutes if fan and exhaust connected to the vented cover

Laser Beam

  • Diameter: 6 mm; option 009: 9mm available
  • Minimum output power: 180 µW (120 µW after 3 years); option 300: 80 uW (50 uW after 3 years)
  • Maximum output power: 1 mW; option 300: 220 uW
  • Beam height: 80.8 ± 1.0 mm

Input Power Requirement

  • +15 V ± 0.3 V at 3.0 A maximum
  • -15 V ± 0.3 V at 0.3 A maximum

The Keysight 5517DL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.

Learn more about Laser Interferometer Position Measurement Systems

KEY SPECIFICATIONS

Beam height (mm)
80.8
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
1329**
Output power (higher power option available) (�W)
> 180
Reference frequency (MHz)
>= 4.4
Warm-up time* if fan is connect to vent body (min)
90 (*45)
Beam height (mm)
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
Output power (higher power option available) (�W)
Reference frequency (MHz)
Warm-up time* if fan is connect to vent body (min)
80.8
1329**
> 180
>= 4.4
90 (*45)
View More
Beam height (mm):
80.8
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used:
1329**
Output power (higher power option available) (�W):
> 180
Reference frequency (MHz):
>= 4.4
Warm-up time* if fan is connect to vent body (min):
90 (*45)

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