Highlights

General

  • Maximum velocity with linear optics: 1 m/s
  • Reference frequency: 3.4 to 4.0 MHz
  • Weight: 3.4 kg (7.5 lb)
  • Warm up time: 90 minutes

Laser beam

  • Diameter: 6 mm; Option 039: 9 mm & > 300 µW
  • Minimum output power: 180 µW ; Option H01: 300 µW
  • Maximum output power: 1 mW
  • Beam height: 79.5 ± 1.0 mm

Input power requirement

  • +15 V ± 0.3 V at 3.0 A maximum
  • -15 V ± 0.3 V at 0.3 A maximum

Primary uses for the Keysight 5517D include VME- and PC-based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.

KEY SPECIFICATIONS

Application
VME、PC、Keysight 5501A 與 Keysight 5527A 系統
Beam height (mm)
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
1012
Output power (higher power option available) (�W)
> 180
Reference frequency (MHz)
3.4 to 4.0
Reference frequency
3.4 至 4.0 MHz
Application
Beam height (mm)
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
Output power (higher power option available) (�W)
Reference frequency (MHz)
Reference frequency
VME、PC、Keysight 5501A 與 Keysight 5527A 系統
79.5
1012
> 180
3.4 to 4.0
3.4 至 4.0 MHz
View More
Application:
VME、PC、Keysight 5501A 與 Keysight 5527A 系統
Beam height (mm):
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used:
1012
Output power (higher power option available) (�W):
> 180
Reference frequency (MHz):
3.4 to 4.0
Reference frequency:
3.4 至 4.0 MHz
Velocity:
1000 mm/s
Warm-up time* if fan is connect to vent body (min):
90

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