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MEMS/NEMS Device Measurement Solution
Accelerate Your Research, Development, and Manufacturing Efficiency
MEMS (Micro Electro Mechanical Systems) is the technology to build very small devices, whose range is generally from a millimeter to a micrometer. NEMS (Nano Electro Mechanical Systems) is similar but its range is a nanometer. MEMS/NEMS device is the integrated device, on which movable parts, sensor, actuator, and electronic circuit are built by MEMS/NEMS technology.
Keysight Technologies offers several instruments to help the R&D activity of the MEMS/NEMS device.
Keysight can help you to establish more accurate device modeling, more efficient failure analysis, and better process by the solutions below.
Measurements, Example Devices & Solutions
| Displacement→Electric Signal Transducer Technology (Sensor) | |||
|---|---|---|---|
| Electrostatic | Piezoelectric | Magneto-impedance | |
| Pressure Sensor | X | X | - |
| Accelerometer | X | X | X |
| Gyroscope | X | X | - |
| Flow Sensor | - | X | - |
| Magnetometer | - | - | X |
| Electric Signal→Displacement Transducer Technology (Actuator) | ||||
|---|---|---|---|---|
| Electrostatic | Electromagnetic | Piezoelectric | Other Information | |
| Optical Switch | X | X | - | Optical Evaluation |
| Optical Scanner | X | X | X | Optical Evaluation |