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SMM Imaging of Dopant Structures of Semiconductor Devices

SMM Imaging of Dopant Structures of Semiconductor Devices

Applikationsberichte

Scanning Microwave Microscope (SMM) has been engineered to leverage the outstanding accuracy and flexibility of a vector network analyzer (VNA) for impedance measurement, particularly for quantitative capacitance measurement on a dielectric sample. Furthermore, it can be engineered to measure differential capacitance (dC/dV) by applying a low-frequency (RF) modulation signal to the microwave (MW) measuring signal. The device for dC/dV measurement is called the dopant profile measurement module (DPMM) that can be attached to Keysight Technologies VNA instruments. The SMM system from Keysight consists of a standard AFM unit and a VNA unit [the performance network analyzers (PNA) series].It also includes a DPMM module and a lock-in amplifier for dC/dV measurement.

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