Highlights

General

  • Number of axes per board: 2
  • Maximum number of boards per system: 7 (consult Keysight for larger board groups)
  • 36-bit 2's complement
  • Resolution up to 0.3 nm with high resolution optics
  • Max linear interferometer velocity (must use E1709A receiver): 2.2 m/s

Operation with plane mirror optics

  • Resolution: 0.6 nm
  • Working range: ± 10.6 m

Timing

  • Position update rate: 10 MHz
  • Data rate over backplane: > 100 kHz
  • Multi-board sync : ± 2 ns

Special features

  • Flexible Hardware IO
  • Easy and Programmable routing of Ref and Meas signals for multi-axis systems
  • Essentially two enhanced 10897D axes on one 6U board

The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.

KEY SPECIFICATIONS

Bus
VME
Max Data rate for direct hardware outputs (kHz)
10000
Max Data rate over bus (kHz)
100
Number of Axes per board
2
Plane Mirror (PM) Resolution (nm)
0.6
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
± 1100*
Bus
Max Data rate for direct hardware outputs (kHz)
Max Data rate over bus (kHz)
Number of Axes per board
Plane Mirror (PM) Resolution (nm)
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability
VME
10000
100
2
0.6
± 1100*
View More
Bus:
VME
Max Data rate for direct hardware outputs (kHz):
10000
Max Data rate over bus (kHz):
100
Number of Axes per board:
2
Plane Mirror (PM) Resolution (nm):
0.6
System PM velocity limit (mm/s) * depends on laser head, axis board and receiver capability:
± 1100*

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