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As semiconductor devices become increasingly complex and design cycles accelerate, traditional compact modeling approaches often struggle to balance accuracy, scalability, and development efficiency. To address these challenges, we present a hybrid modeling methodology that integrates physics-based compact models with Artificial Neural Networks (ANN). This Hybrid Physics-Based ANN framework leverages the predictive power of machine learning while preserving physical interpretability and ensuring simulation robustness. Using Keysight’s IC-CAP ANN Toolkit, we demonstrate how accurate Verilog-A models can be rapidly generated from measured and derivative data. The approach significantly improves fitting across IV, CV, and S-parameter domains, as illustrated through real-world GaN HEMT modeling with the ASM-HEMT model. By combining physical rigor with AI-driven adaptability, this methodology reduces model development time and enhances confidence in predictive simulations—offering a practical path forward for both emerging technologies and the refinement of established device models.
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