Automated Wafer-level Testing with Keysight WaferPro and FormFactor Velox
Application Notes
Modern semiconductor characterization requires efficient, automated wafer-level testing to support increasingly complex device layouts and shrinking technology nodes. This application note demonstrates a unified automation approach using Keysight WaferPro integrated with FormFactor Velox software to streamline wafer-level measurements. By leveraging the VeloxMP driver and WaferSync interface, the solution enables seamless control of motorized positioners, prober configuration, thermal chuck operation, and wafer map synchronization within a single test environment.
The methodology eliminates manual probe reconfiguration by supporting multiple device layouts within a single automated test plan, significantly improving measurement efficiency and repeatability. The workflow is validated through automated DC characterization of MOSFET devices across multiple dies, layouts, and temperatures, demonstrating synchronized measurement execution and real-time data handling.
This integrated solution simplifies complex wafer probing workflows while enhancing throughput, alignment accuracy, and test consistency, making it well-suited for advanced device modeling and characterization applications.