3D Mach-Zehnder Modulator
Application Notes
This application example demonstrates the simulation of a 3D Mach-Zehnder Modulator (MZM) on a silicon-on-insulator platform using Keysight's Sentaurus TCAD and RSoft tools. The MZM contains interleaved PN junctions (an interface between p-type and n-type semiconductors) and requires a complete 3D simulation approach to capture the electrical, optical, and fabrication-related physics involved.
A mixed-level workflow is used. Sentaurus TCAD’s Spatial Database Engine (SDE) module generates the device structure and calculates the carrier-induced index perturbation under applied voltage, producing a TDR file. This data is imported into the RSoft CAD for optical analysis. RSoft’s BeamPROP is then used to compute mode profiles and simulate phase shifts along the modulator arms.
Simulations are performed across a range of bias voltages from -3 V to 0 V to calculate the output phase response. This data can be used to extract important modulator characteristics, such as phase shift efficiency. This example highlights how combining Sentaurus TCAD and RSoft provides a complete and rigorous solution for 3D MZM design.