4157B Modular Semiconductor Parameter Analyzer

General Features

• Flexible, expandable and upgradeable modular parametric instrument controlled via I/CV 3.0 Lite software
• Ultra low current measurement without external preamplifiers
• Flexible to provide stable 100aA measurements
• Switch between CV and IV measurement without wasting time swapping cables

Measurement Capabilities

• 1 femtoamp current measurement resolution without external preamplifiers (High-Resolution SMU)
• 100 attoamp current measurement resolution using HRSMU with Atto Sense & Switch Unit (ASU)
• 10 femtoamp and 0.5 microvolt measurement resolution (Medium-Power SMU)
• +/- 200 Volts and +/- 1 Amp output by High-Power SMU

I/CV 3.0 Lite Software Capabilities

• Drivers for all of the popular semiautomatic wafer probers
• Intuitive GUI-based switching matrix control for the B2200A, B2201A, and E5250A
• Test sequencer for automating testing across an entire wafer
• Post-test graphical analysis and wafer mapping capability

The 4157B offers flexibility, expandability, and upgradeability in a PC-based measurement environment, providing a complete solution for parametric measurement and analysis.

On this page: Industry Challenges · Summary · Features and Benefits · Components · Key Specifications

Industry Challenges

Engineers and scientists working on current and future semiconductor process technologies face a variety of parametric measurement challenges.

• Reducing the cost of test. Flexible and expandable solutions are needed to allow for solution customization and to ensure that measurement hardware does not become obsolete.
• Precise ultra low current and low voltage measurement. Certain structures require current measurement resolution < 1 femtoamp and/or voltage measurement resolution < 1 microvolt.
• Easy capacitance versus voltage (CV) and current versus voltage measurement (IV). Both CV and IV measurement are required for semiconductor device characterization, but switching between these is difficult (especially when using positioners on a wafer prober) because of the required cable swapping.

Summary

Solves the most extreme parametric measurement challenges.

The 4157B meets the most extreme parametric measurement challenges. For engineers and scientists working on current and future semiconductor process technologies, the 4157B provides a solution that both meets their needs and lowers their cost of test. The wide variety of available modules and advanced measurement features of the 4157B (such as custom sweep/step capability, multi-channel sweep mode with parallel test capability, linear/binary search, range management, and force value self-monitoring) provide a complete solution for parametric measurement and analysis.

Unlike solutions that include both the system controller and measurement resources combined, the 4157B gives you the freedom to manage these resources separately, thereby avoiding the expensive problem of the PC controller becoming obsolete years before other elements. Because you can upgrade your PC controller hardware or software without losing the use of your instrument, your investment is protected against unforeseeable shifts in PC technology. The 4157B ranges in price from US $25,000 to $100,000, depending on module configuration and options.

• Ultra low current measurement without cumbersome external preamplifiers
  
  The 4157B HRSMU supplies 1-femtoamp measurement resolution without any need for external preamplifiers.
  
  For situations not requiring ultra low current measurement, the 4157B HRSMU provides an extremely efficient solution. The 4157B HRSMU can supply 1-femtoamp measurement resolution without cumbersome external preamplifiers. This innate capability enables you to meet the measurement challenges posed by the vast majority of current and future devices.
  
  The HRSMU (as well as the redesigned MPSMU) also supports new 0.5 V and 5 V measurement ranges, which improve measurement accuracy for modern lower-voltage transistors. The HRSMU (and redesigned MPSMU) also provides voltage measurement resolution down to 0.5 microvolts.
• Flexibility to provide stable 100 attoamp measurements
  
  The 4157B HRSMU accepts an optional atto sense and switch unit (ASU), which increases the low current measurement resolution of the HRSMU to 100 attoamps.
  
  The 4157B HRSMU can combine with the ASU to provide 100 attoamps of current measurement resolution, which is necessary for certain extreme characterization needs such as memory cell leakage testing. In addition, you can also make voltage measurements and force both voltage and current up to the limits of the HRSMU specification when using the ASU.
• Switch between CV and IV measurement without wasting time swapping cables
  
  The ASU enables switching between 100 attoamp measurement and precise capacitance measurement without changing any cabling.
  
  The 4157B ASU possesses two BNC inputs that Keysight has designed to be compatible with the outputs of a capacitance meter. Simple software commands enable you to switch between SMU based measurement (IV) and capacitance meter based measurement (CV) without having to change any cabling. Of course, you can also use the BNC inputs with other instruments such as a digital voltmeter (DVM) or a pulse generator unit (PGU). Not matter what your configuration, the ASU provides better switching measurement performance than an external switching matrix, and offers improved ease of use.

Features and Benefits

Components

• E5241C I/CV 3.0 Lite
• E5270B Precision Measurement Mainframe
• E5280B High Power Source/Monitor Unit module (HPSMU)
• E5281B Medium Power Source/Monitor Unit module (MPSMU)
• E5287A High Resolution Source/Monitor Unit module (HRSMU)
• E5288A Atto Sense and Switch Unit (ASU)
• Notebook PC
• Keysight 82357A USB/GPIB Interface
• Cables and accessories

Key Specifications

For more information about curve tracers and precision current-voltage analyzers, please visit Parameter and Device Analyzers, Curve Tracer.

Learn more about Keysight Parametric Test Solutions