B2200A Femtoamp Low Leakage Switch B2201A 14-Channel Low Leakage Switch E5250A Low Leakage Switch

Parametric instrument integration challenges

Semiconductor parameter analyzer users frequently need to use other instruments such as capacitance meters, precision digital voltmeters, and pulse generators. The integration of all these different instruments, however, presents many measurement challenges. For example, parameter analyzer source/monitor units (SMUs) have triaxial outputs that require adapters for connecting to coaxial-based instruments. In addition, a system is necessary to organize the cables coming from the various instruments. Finally, the need to manually switch between triaxial and coaxial cables makes it impossible to automate measurements on the device under test (DUT).

Switching matrices give rise to performance issues

Switching matrices can solve instrument integration issues, but they can create their own measurement problems. Some switching matrix relays add noise and current leakage paths. This problem typically degrades the current versus voltage (IV) measurement performance relative to that of a standalone parameter analyzer. Capacitance versus voltage (CV) measurements require compensation of the signal path length, but switching matrices create variable path lengths. This makes capacitance measurement compensation much more difficult. Most probe card interfaces also further degrade the IV and CV measurement performance of the overall solution.

Keysight switching matrices meet these measurement challenges

Keysight Technologies, Inc. supplies both Kelvin and non-Kelvin switching solutions to meet all of these challenges. Keysight solutions do not compromise the integrity of your parameter analyzer, and they support accurate CV and low-current IV measurements. Whatever switching needs you have, Keysight offers a solution that both minimizes cost and maximizes the flexibility and integrity of your measurements. Best of all, Keysight’s switching solutions easily combine with the B1500A Semiconductor Device Analyzer and EasyEXPERT group+ software to create a complete parametric test environment.

Measurement performance without compromise

The Keysight B2200A Femtoamp Low Leakage Switch and Keysight B2201A 14-channel Low Leakage Switch provide exceptional measurement performance. The B2200A and B2201A allow you to achieve current measurement resolutions of 1 fA and 10 fA respectively. Kelvin connections on up to four SMUs are also supported. These features allow you to realize the full measurement potential of your parameter analyzer while benefiting from the measurement flexibility inherent in a switching matrix-based solution.

Easy to use and control

The B2200A and B2201A have identical user interfaces. They can be controlled remotely via GPIB commands or directly from their front panels via the keypad or optional light pen. This makes it easy to perform simple debug operations without using an external controller. In addition, a lighted display provides a convenient visual reference of the relay status. A VXIplug&play driver is also available for use with popular programming languages such as VEE and LabView.

Economical switching solutions for non-Kelvin characterization needs

The Keysight E5250A Low Leakage Switch supports non-Kelvin measurement on four SMUs, with six additional multiplexed inputs for other needs. Besides supporting traditional matrix functionality (Keysight E5252A cards), the E5250A also supports long-term reliability stress testing (Keysight E5255A cards). The E5250A can be configured with one to four output cards of either type. Just like the B2200A and B2201A, the E5250A also supports a VXIplug&play driver for easy programmatic control.

Flexible switching solutions with Kelvin capability

The B2200A and B2201A both support Kelvin measurement on up to four SMUs (eight triaxial inputs). They also provide six additional coaxial inputs for other instruments, such as capacitance meters and digital voltmeters. Each input corresponds to a unique internal path (14 internal paths total), and each triaxial input has the same low-current measurement performance. The B2200A and B2201A mainframes can be configured with one to four Keysight B2210A or Keysight B2211A matrix cards respectively. Each card provides twelve triaxial outputs, which permits x12, x24, x36 and x48 output configurations.

Advanced capabilities simplify common measurement tasks

The B2200A and B2201A have many ingenious features that enhance the utility of the instruments. For example, you can save up to eight setups into nonvolatile memory for fast and easy retrieval at a later time. Another feature lets you use the “couple port” mode to designate pairs of triaxial inputs as Kelvin. This eliminates the possibility of incorrectly connecting the Force and Sense lines when using Kelvin triaxial cables. An auto-detect feature is also available where matrices automatically place the inputs into couple port mode, if a Kelvin cable is connected to the triaxial inputs. A “bias port” mode is also supported, which makes it easy to specify one of the inputs (triaxial or coaxial) as a bias source for use in stress testing applications. Finally, two of the B2200A and B2201A coaxial inputs are optimized for CV measurement for improved accuracy.

Intuitive GUI switching matrix control

Keysight EasyEXPERT group+ software running on the B1500A and an external PC allow you to create and save B2200A and B2201A switch setups via a Windows-based GUI. You can connect or disconnect any input and output by simply clicking on an intersection point. The intrinsic capacitance compensation ensures accurate CV measurements. Switching matrix capacitance compensation is supported for the B2200A and B2201A in EasyEXPERT group+ when using the B1500A’s multifrequency capacitance measurement unit (MFCMU). Cable lengths are automatically compensated up to the output of the switching matrix, and you can create your own compensation file to correct for the additional cables and probes going out to the DUT if desired. Using the two optimized BNC capacitance inputs, you can easily switch between accurate CV measurements and 4-SMU Kelvin IV measurements, with four BNC inputs still available for other instrumentation.

Windows-based, point-and-click GUI Make accurate CV measurements through the B2200A and B2201A. input labels are automatically linked to the active application test, and you can create mnemonic labels for the output ports. Once saved, switching matrix setups can be recalled programmatically and automatically executed in conjunction with parametric measurements and wafer prober moves.