Accurate Evaluation of MEMS Piezoelectric Sensor and Actuator
Application Notes
Introduction
- Excellent impedance measurement accuracy and repeatability
- Easy evaluation of resonance, anti-resonance, and mechanical characteristics using the impedance measurement method
- A wide variety of analysis functions such as equivalent circuit analysis
This application brief describes the benefits of using the Keysight Technologies, Inc. E4990A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency. The Keysight E4990A Impedance Analyzer offers excellent impedance accuracy and is an ideal evaluation tool for design and manufacturing test.
MEMS Piezoelectric Sensors and Actuators
MEMS devices such as accelerometer sensors and micro actuators are often micro-fabricated piezoelectric devices that convert a mechanical displacement to an electric signal. These piezoelectric devices detect mechanical displacement with the piezoelectric effect. They also transform electric signals to mechanical displacement with an inverse piezoelectric effect.