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N9201A Array Structure Parametric Test System

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主要技術規格

General Features

  • Option for 4070 Series of parametric testers
  • Multi-channel SMU measurement capability
  • One pass platform on 4070 Series
  • Concurrent TEG test/measurement

Measurement Capabilities

  • Up to 40 SMU channels
  • 5 picoamp and 100 microvolt measurement resolution
  • Address signal generation
  • SMU embedded program memory for concurrent measurement

Application for BEOL/Yield Ramp Up

  • Good for BEOL TEG testing (Resistor,Vth,etc.)
  • Concurrent measurement resource for High/Low resolution TEG part
  • Improve existing 4070´s throughput drastically for BEOL TEG testing

Addressable Array Test Structure Test Capability

  • Address Generation Function on Parametric Tester
  • SPC (Statistical Process Control) for DFM
  • Up to 32 bit parallel address signal generation
  • Up to 8 V/125 mA/50 kbps address signal generation