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5517CL Laser Head
The Keysight 5517CL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.
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HIGHLIGHTS
General
- Maximum velocity with linear optics: 711 m/s
- Reference frequency: 2.4 to 3.0 MHz
- Weight: 3.2 kg (7 lb)
- Warm up time: 45 minutes if fan and exhaust connected to the vented cover
Laser Beam
- Diameter: 6 mm; option 003: 3mm & option 009: 9 mm available
- Minimum output power: 180 µW
- Output power: 1 mW
- Beam height: 80.8 ± 1.0 mm
Input Power Requirement
- +15 V ± 0.3 V at 2.2 A maximum
- -15 V ± 0.3 V at 0.03 A maximum
The Keysight 5517CL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Option 009 allows a larger angular range of measurement by providing a 9 mm beam diameter for use with three-axis interferometers. Please contact Keysight for custom requirements.
Learn more about Laser Interferometer Position Measurement Systems
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