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雷射頭

雷射頭是所有雷射動作與定位量測系統使用的雷射光束的來源。雷射頭的主要差異在於速度、參考頻率與光學輸出功率。其他的考慮因素則包括大小、散熱與輸入功率需求。您應該選擇何種雷射,主要取決於您的應用。舉例來說,半導體平版印刷系統通常使用較快的移動零件(階段),因此需要比機器工具應用更快的速度。

利用適當的光學與系統電子來配置雷射頭,以構成一個能滿足各種應用的獨特實體佈局與量測需求之雷射干涉儀系統。我們可以協助您設計一個自訂的定位量測系統,來達到提升產品品值、提高良率、以及順利生產出精密產品的目標。

從下表中選擇您所需要的雷射頭。有關所有雷射頭共有的特性,請見下表。如果您需要不同的速度、參考頻率或光束直徑,請與我們聯絡。

標題文字:所有的雷射頭都具有下列特性:

類型:氦氖、連續波輸出、兩個頻率(外差式)。

極性:水平的f1是較低的頻率,垂直的f2是較高的頻率。f1與f2之間的差為參考頻率。請見下表的說明。

光束輸出功率:最小180 uW,最大1 mW(例外:5517B,最小120 uW,最大1 mW)。提供較高的功率位準。請與我們聯絡。

光束直徑:標準為6 mm(0.25 in)。另有提供3 mm和9 mm。

波長:632.9913720 nm(公稱值,真空狀態)。

波長準確度:± 0.1 ppm(真空狀態,3 sigma,使用期限)。依MIL-STD 45663標準進行工廠校驗達± 0.02。

波長穩定度:1個小時為± 0.002 ppm(典型值,真空狀態),在使用期限內為± 0.02 ppm(真空狀態)。

量測範圍:所有軸的總和為40公尺(130英呎)。

暖機時間:<10 分鐘(通常為4分鐘)。

安全等級:符合U.S. National Center for Devices and Radiological Health Regulations 21 CFR 1040.10 and 1040.11的Class II雷射產品。

MTBF:> 50,000個小時,典型值。

磁場強度:與包裝雷射頭表面上的任何一點距離4.6公尺(15英呎)時<= 5.25 milliGauss(因為電子管附近的永久磁鐵,非操作狀態)。

輸入功率需求:在2.2A時最大為+15V ± 0.3V,在0.02A時最大為-15V ± 0.3V,5519A/B則使用AC功率輸出。請參考產品網頁,以取得更詳細的資訊。

散熱:操作時為23W,暖機時為35W,5519A/B則分別為33W和50W。
佈線所需的空隙:儀器後面需留12.00 cm(4.72 in),但5519A/B只需留10.00 cm(4 in)。

保固:3年

產品型號後面加上字母 "L"(例如5517BL)的雷射頭,還具有下列特性:

排氣:強制冷卻空氣,以減少電力進入應用中。

比較所有雷射頭 (9)

  • 5517A Laser Head 5517A Laser Head (1) 

    5517A Laser Head

    The Keysight 5517A is used primarily in VME and PC based systems where the velocity of motion is slower, such as machine tool applications.

  • 5517B Laser Head 5517B Laser Head (1) 

    5517B Laser Head

    The Keysight 5517B is used primarily in VME and PC based systems and the 5527A system where the velocity of motion is slower, such as machine tool applications.

  • 5517C Laser Head 5517C Laser Head (1) 

    5517C Laser Head

    The Keysight 5517C is used primarily in VME and PC based systems and the 5501A and 5527A systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517CL Laser Head 5517CL Laser Head (1) 

    5517CL Laser Head

    The Keysight 5517CL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517D Laser Head 5517D Laser Head (1) 

    5517D Laser Head

    The Keysight 5517D is used primarily in VME and PC based systems and the 5501A and 5527A systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517DL Laser Head 5517DL Laser Head (1) 

    5517DL Laser Head

    The Keysight 5517DL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517EL Laser Head 5517EL Laser Head (1) 

    5517EL Laser Head

    The Keysight 5517EL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517FL Laser Head 5517FL Laser Head (1) 

    5517FL Laser Head

    The Keysight 5517FL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

  • 5517GL Laser Head 5517GL Laser Head (1) 

    5517GL Laser Head

    The Keysight 5517GL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications.

Laser Heads [已停產]
Discontinued and obsolete laser heads