HIGHLIGHTS

  • 5 channels, high density per a single-slot module
  • Wide output range, up to 30 V / 500 mA per channel
  • Resolution down to 6 μV / 100 pA
  • Accurate and flexible measurements, from DC to pulsed measurements, with pulse width down to 100 μs at 500 kSa/s sampling rate
  • Seamless current measurement ranging
  • 25 μVrms low voltage source noise performance with PX0107A low noise filter

The Keysight M9614A is a PXIe five-channel source / measure unit (SMU). It supports accurate measurement up to 30 V / 500 mA with resolution down to 6 μV / 100 pA. While a PXIe SMU improves channel density compared with a benchtop SMU, the M9614A enables higher channel density in the same footprint. They also provide a wider output range than a conventional PXIe four-channel SMU at a lower cost per channel. Pulsed and sampling capabilities allow the M9614A to perform a variety of measurements, from DC to pulsed measurements, with pulse width down to 100 μs at a sampling rate of 500 kSa/s. Their seamless current measurement ranging function reduces test duration by eliminating the time it takes to change the range and expands the dynamic range to cover four measurement ranges. These capabilities make the M9614A suitable for applications that require high channel density, such as semiconductor reliability testing and integrated circuit (IC) tests.

KEY SPECIFICATIONS

Max. Sampling Rate
0.5 MSa/s
Maximum Output Current
500 mA
Maximum Output Voltage
30 V
Minimum Current Measurement Resolution
100 pA
Minimum Voltage Measurement Resolution
6 uV
Number of Channels
5
Max. Sampling Rate
Maximum Output Current
Maximum Output Voltage
Minimum Current Measurement Resolution
Minimum Voltage Measurement Resolution
Number of Channels
0.5 MSa/s
500 mA
30 V
100 pA
6 uV
5
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Max. Sampling Rate:
0.5 MSa/s
Maximum Output Current:
500 mA
Maximum Output Voltage:
30 V
Minimum Current Measurement Resolution:
100 pA
Minimum Voltage Measurement Resolution:
6 uV
Number of Channels:
5
Pulse Width Range:
100 us
Slots:
1

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