On-Wafer Testing of Opto-Electronic Components
Application Notes
Introduction
When measurements of optoelectronic components are performed on the wafer, e.g. at an early stage in the device processing, or under balanced operation where exact phase information at the DUT electrical interfaces is needed, it is important to precisely extend the electronic and optical calibration reference planes to the DUT interfaces and to fully reference out the device fixture and cables. Use of Electronic Multiport Calibration Kits, on-wafer calibration standards together with characterization utilities allows electrically calibrating the setup with reference to the coaxial interfaces closest to the DUT and extending this calibration plane to the DUT connection plane, e.g. beyond the wafer probe.
This application note is intended to assist on-wafer applications using the N437xB/C/D Lightwave Component Analyzer with single and dual probes to perform single-ended and balanced opto-electronic component full Sparameter measurements manually.