The Keysight 10897C VMEbus laser axis board offers the highest measurement resolution commercially available in positioning systems. With resolution up to 0.3 nm, it provides ultra-precise position (or distance) information for advanced products such as IC fabrication equipment. The Keysight 10897C is tested at frequencies equivalent to 0.7 m/s plane mirror slew rates.
The register-programmed position axis board provides a 36-bit position word in fractional wavelengths. The word is readable over the VMEbus and is also available from a real-time hardware output on the A and C rows of the P2 connector. Its very high data rates accommodate high-bandwidth, high-performance closed-loop applications. Configured with appropriate laser and optics components, the Keysight 10897C supplies unsurpassed positioning accuracy for dynamic measurements.
- VMEbus Position Output
- Data Format:
- Units: fractions of a wavelength
- 2's Complement: choose any 32 of 35 bits to read
- Positive Logic
- Data Rate Over Backplane: >100 kHz
- Sample Data Age:
- Fixed: After a synchronous sample operation, the value in the position register will reflect the actual position that occurred approximately X ns before the sample operation was initiated. There are two user-selectable values of X, 290 ns and 790 ns.
- Sample Delay:
- The position register may be read 100 ns or 600 ns after a hardware sample operation, via the sample delay register bit.
- P2 Connector Hardware Position Output
- Data Age:
- Fixed: The data on the hardware output line will reflect the position that occurred approximately 1.2 us before the next rising edge of the 10 MHz clock.
- General Information
- VME Compliance:
- A16 Data Transfer Cycles
- D16 Data Transfer Cycles
- A24 Data Transfer Cycles
- D32 Data Transfer Cycles
- D08(O) Interrupt Acknowledge Cycles
- Power Requirements:
- 5 Vdc + 0.25 V/-0.125 V at less than 3.5 A
- +12 V +/-0.5 V at less than 0.1A
- -12 V +/-0.5V at less than 0.025A
- Cooling Requirements:
- 19 linear meters (60 linear feet) per minute for 0-40 degrees C operation 76 linear meters (250 linear feet) per minute minimum for 0-55 degrees C operation
- Reduced data age ambiguity ensures dynamic accuracy
- Low noise rating improves repeatability
- Full electrical and mechanical compliance with VMEbus specifications
- Programmable signal routing
- High reliability backed by three-year warranty
- Integrated board functions reduce system size, complexity, development time, and cost