The SMUs of B1500A integrate 4-quadrant voltage/current source and measurement capabilities for accurate IV measurement with the range of 0.1 fA - 1 A / 0.5 µV - 200 V. It supports spot, sweep, pulse sampling and QS-CV measurements.

HIGHLIGHTS

Absolute confidence in current-voltage (IV) measurement for DC and time dependent measurement

  • 4-quadrant source and measurement capabilities in the range of 0.1 fA - 1 A / 0.5 µV - 200 V for accurate current-voltage (IV) characterization
  • Spot, sweep, pulse and sampling measurement capabilities for various measurements
  • Minimum sampling measurement interval 100 μs and minimum pulse width 500 μs
  • Quasi-Static Capacitance-Voltage (QS-CV) measurement with leak current compensation 

Uncompromised DC measurement performance for low current /voltage measurement down to sub-fA / µV resolution

The Source/Measure Units (SMUs) are the key measurement modules of Keysight B1500A Semiconductor Device Parameter Analyzer. The SMUs integrate voltage/current source and measurement capabilities into a module, and it enables accurate DC current-voltage (IV) measurement with down to fA / µV resolution. The low current measurement performance can be expanded down to sub-fA level by the optional ASU (Atto sense switch unit) if you need more measurement performance.
The SMU can also perform the Quasi-Static Capacitance-Voltage (QS-CV) measurement. It is a measurement method to obtain low frequency CV characteristics, and it is important to characterize the surface state of the gate of transistor as well as high frequency CV. Keysight B1500A enables accurate QS-CV measurement with the leak current compensation.
Along with analysis and data management capability of EasyEXPERT software, it is very powerful and useful to perform characterization for semiconductor, nano devices such as carbon nanotube (CNT) and carbon nanowire (CNW), active/passive component, material and any electric devices that require accurate and precise voltage/current measurement.

Accurate time dependent characterization such as pulse and sampling measurements by hardware clocked precise timing control

In addition to DC measurement, the SMUs of Keysight B1500A provides the advanced time dependent measurement capabilities such as pulse forcing and sampling measurement capabilities. The pulse and sampling measurement capabilities are powerful to unveil and capture the dynamic characteristics, and the timing accuracy is very important for the time dependent measurement. The SMUs of Keysight B1500A enables to performance accurate measurement by hardware clocked precise timing control. Minimum sampling measurement interval can be down to 100 μs, and minimum pulse width can be down to 500 μs.

Keysight B1500A provides three types of SMUs as follows for your test needs.

SMU Model Key Features and specifications
B1510A High Power Source/Measure Unit (HPSMU)
  • Range up to 200 V / 1 A with 4-quadrant operation
  • Minimum measurement resolution 10 fA / 2 μV
  • Minimum source resolution 50 fA / 100 µV
B1511B Medium Power Source/Measure Unit (MPSMU)
  • Range up to 100 V / 0.1 A with 4-quadrant operation
  • Minimum measurement resolution 10 fA / 0.5 μV
  • Minimum source resolution 50 fA / 25 µV
  • Optional ASU (atto-sense and switch unit) is supported to expand the range down to 1pA range with 0.1 fA measurement resolution
B1517A High Resolution Source/Measure Unit (HRSMU)
  • Range up to 100 V / 0.1 A with 4-quadrant operation
  • Minimum measurement resolution 1 fA / 0.5 μV
  • Minimum source resolution 5 fA / 25 µV
  • Optional ASU (atto-sense and switch unit) is supported to expand the range down to 1pA range with 0.1 fA measurement resolution

For more information about Keysight Semiconductor Parameter Analyzer, please visit B1500A Semiconductor Device Parameter Analyzer and Measurement Modules.

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