Column Control DTX

Surface Observation

Flyers

Surface observation

The nano-scale surface observation solution for semiconductor wafer/die, resist, polymer, etc.

High resolution FE-SEM comes on bench-top!

"Limited space but want a high resolution SEM?"

"Want to image nonconductive or energy sensitive surface?"

"Want to shorten preparation time before observation?"

Yes, we can support for you!

Succeeded to FE-SEM miniaturization!

Unique to Keysight, brand new miniature electrostatic beam column including a FE electron source and an electrostatic lens has developed. It's only 85mm width x 38mm height, while a conventional column has 500 – 800mm height. The world's first compact FE-SEM comes on bench-top.

True surface observation with FE performance

"Difficult to observe the true surface morphology because of conductive layer coating on nonconductive specimens..." "The high energy beam damages specimen surface..."

The low-voltage imaging solves those issues. Real-time controllable accelerating voltage can go down to minimum 0.5keV and it reveals the true surface morphology by not having to coat the specimens.

Easy to change samples, start measurement in 5min

A small chamber allows reducing pump-down time drastically. It contributes to the improvement of work efficiency particularly when the user needs to observe a lot of samples one after another in short time. 

Resolution <10nm @1keV

A few nm thick Cr/W coating on Si can be observed clearly by very low accelerating voltage control.

Elemental analysis also available

The EDS (Energy Dispersive Spectroscopy) option provides qualitative and quantitative element analysis.

Repeatable performance without re-tuning

By innovation, Keysight patented allelectrostatic lens design eliminates any hysteresis effect and ensures repeatable performance without constant re-tuning.

Easy of use operation

Large caliber sample stage allows changing sample easily. Programmable X, Y, Z stage remembers precise coordinates for post analysis.

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Column Control DTX