10897D High Resolution VME Laser Axis Board

 The new 10897D High Resolution VME Laser Axis Board offers the outstanding performance for which Keysight Technologies, Inc. is known. The excellent resolution and low noise performance of the Keysight 10897D provide the ultimate in repeatable and accurate positioning for advanced applications such as IC fabrication.

The 10897D offers very high data rates to provide exceptional bandwidth and high-performance closed-loop positioning for critical applications. The 10897D’s standard VMEbus interface speeds system integration, saving valuable time and money. To further

simplify and speed system layout, the 10897D also offers programmable signal routing.

Keysight 10897D High Resolution VME Laser Axis Board

High Performance for Advanced Applications

The Keysight 10897D High Resolution VME Laser Axis Board offers outstanding position resolution and low noise, resulting in unsurpassed positioning repeatability and accuracy compared to previous laser systems. The Keysight 10897D provides measurement resolution up to l/2048, or 0.3 nm (3 Å) with the high resolution plane mirror interferometer. The Keysight 10897D is tested at frequencies equivalent to

700 mm/s plane mirror slew rates.

Systems generally can compensate for data age, the constant time lag between triggering a measurement and receiving the data, but not for variable data age, the portion that changes and translates directly into stage position error. For example, a stage moving at 500 mm/s with 800 ps of variable data age has a minimum 0.4 nm position error due to variable data age.

The unique Keysight 10897D design has improved dynamic positioning accuracy by reducing the variable data age to less than 1 nanosecond for most applications. This results in unsurpassed positioning accuracy when compensating moving systems for the delay between the position measurement and the time the position information is available. Dynamic accuracy is especially important for E- beam machines and step and scan IC fabrication tools.

High Performance for Advanced Applications (continued)

The 10897D contains an onboard, lowpass filter which may be enabled to provide more stable operation in low signal- to-noise conditions. This filter is programmable to provide the most stable positioning for your specific application.

The 10897D is a register- programmed position axis board that provides a 36- bit position word in fractional wavelengths. The position word is readable over the VMEbus and is also available from a real- time hardware output on the A and C rows of the P2 connector.

Flexible VMEbus Electronics Speed System Integration

The Keysight 10897D is a 6U- size board that complies electrically and mechanically with Revision C.1 of the VMEbus specifications. The heart of the 10897D is a proprietary interpolator specifically designed for this application. Surface mount technology is used to provide a compact, reliable design.

To further simplify and speed system layout, the 10897D offers programmable signal routing. Cable routing is flexible; the reference and measurement signals can come from either the front panel connectors, the rear P2 connector, or the multiaxis interconnect cable.

The 10897D uses Keysight 10880A/B/C or N1250A/B/E Receiver Cables, and 10881A/B/C/D/E/F Laser Head Cables. Contact your Keysight representative for more information about cable options.