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Laser Interferometer Systems Compensation Number Calculations – Product Fact Sheet

Laser Interferometer Systems Compensation Number Calculations – Product Fact Sheet

Product Fact Sheets

Keysight Laser Interferometer Systems Compensation Number Calculations

The Keysight Technologies, Inc. laser interferometer systems require compensation when used in an air environment. Several ways exist to obtain a compensation number (Comp Num). One is to use the Modified Edlén equation with pressure, temperature, and humidity sensors. Another is to measure an artifact with a known fixed length using a laser measurement axis and calculate a Comp Num from the raw data. A third is to track changes with a Wavelength Tracking Interferometer (WTI). Note that this method requires an initial compensation value from one of the other two methods.

Key features

  • Operation in air requires compensation
  • Use environmental sensors and modified Edlén equation to get Comp Num
  • Translate reading from artifact measurement into initial Comp Num
  • Translate readings from WTI axis into real time Comp Num

Rearrange position equation¹ to calculate Initial Comp Num from artifact measurement:

Use fundamental equation twice, along with Initial Comp Num, to calculate Comp Num from WTI axis data:

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