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Application Notes
Nanoscale devices require both lower signal levels and lower power levels for proper operation. In order to characterize these devices and the semiconductor processes on which they are made, it is essential to be able to make accurate low-level current measurements. The Keysight Technologies, Inc. B1500A Semiconductor Device Analyzer meets this need by supporting current measurements in the sub fA range. This application note will explain how to evaluate MOSFET subthreshold characteristics precisely using the B1500A’s ultra low current measurement capabilities.
Low-current measurement challenges
Accurate low current on-wafer measurements face many challenges that can potentially degrade measurement quality including:
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