Does typical permittivity measurement accuracy includes all the uncertainties due to the E4991A with opt 002, 16453A and MUT insertion conditions?

Yes. All the uncertainties are included in the typical measurement accuracy. The E4991A with Option E4991A-002 and the 16453A perform permittivity measurement according to the theory described in Appendix E of the E4991A operation manual. For the typical permittivity measurement accuracy of the E4991A with option E4991A-002, refer to specification in the E4991A operation manual.