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Testing MEMS Electromagnetic Switch Actuators with LCR Meters

Application Notes

Introduction

– Exceptional accuracy and repeatability

– Impedance and DC resistance measurements (Option 001)

– High test throughput with scanner interface (Option 301)

This application brief describes how the Keysight Technologies, Inc. E4980A improves the test efficiency of electromagnetic MEMS optical switch actuators.

Keysight E4980A Precision LCR Meter

The Keysight E4980A Precision LCR Meter, with extremely high accuracy and speed, isthe ideal tool for research and development, as well as manufacturing test.

Electromagnetic MEMS Optical Switch Actuators

For MEMS optical switches as well as other devices, the electromagnetic actuator is often used as the actuator of the movable part. A micro coil and magnetic material operate the object. The basic principal of operation is the same as that of a mechanical relay.

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