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MEMS Technologies Courseware

The DreamCatcher(Keysight solution partner) ME5000 MEMS Technologies teaching solution offers a ready-to-teach package in Micro-Electro-Mechanical Systems (MEMS) technologies, micro fabrication process, electrical characterization, and its various applications. This is a resource for lecturers consisting of teaching slides, training kits, lab sheets, and problem-based assignments. To read more about the MEMS Technologies courseware, click here .

Teaching Slides Training Kit Keysight Instruments/ Software
Teaching Slides Training Kit Keysight Instruments/ Software
  • Editable Microsoft® PowerPoint® slides
  • Covers 45 hours of teaching
  • MEMS hardware kit and accessories
  • Lab sheets and model answers
  • Problem-based assignments
  • Covers 24 hours of labs
  • Precision Source Measure Unit (SMU)
  • CAE software for MEMS
Target university subject Target year of study Prerequisite(s)
MEMS Technologies 3rd Year or Final year undergraduate Basic Electronics


Teaching Slides Training Kit Instruments Model / Software
Topics Covered:
  • Introduction to MEMS Technologies
  • Micro Fabrication Processes
  • Micro Sensing Sensors and Systems
  • Micro Actuators and Actuating Systems
  • MEMS Measurement Basics
  • MEMS Applications and Case Studies

List of Lab Sheets:

  • Introduction to B2902A Precision SMU
  • Parametric Measurement of MEMS Sensors
  • MEMS Sensing – Static Measurements
  • MEMS Sensing – Dynamic Measurements
  • MEMS Sensing – Application
  • MEMS Layout Drawing and Anisotropic Etch Simulation
  • Electrostatic Comb-drive of MEMS device
  • Diaphragm deflection simulation of MEMS device

Problem-based assignments:

  • Designing a Capacitive Pressure Sensor
  • Designing a Piezoresistive Accelerometer

Recommended Keysight Solutions:
Precision Source Measure Unit (SMU):

  • Keysight B2902A Precision Source/Measure Unit

Intellisuite CAE software for MEMS:

  • Modules required: AnisE, 3DBuilder, Blueprint, FabViewer, ThemoElectroMechanical

DOWNLOAD  Sample teaching slides, lab sheets and demo videos.

The DreamCatcher ME5000 MEMS Technologies Courseware can be purchased from our solutions partner, DreamCatcher .

To order the complete solution or for inquiries, contact us.

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