Evaluation of Failure in Low-k Films Using Dynamic Imaging
Publication Number: 5990-6331EN
Publication Date: 2014.07.30
Language: English
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Evaluation of Failure in Low-k Films Using Dynamic Imaging

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This article presents the use of dynamic imaging and stiffness mapping on low-k materials for analyzing crack lengths in the measurement of fracture toughness and for determining the “finger prints” of failure during scratch testing.