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4073B Ultra Advanced Parametric Tester

Product Status: Discontinued | Currently Supported
This product is no longer available

A replacement for this product is available:

Key Features & Specifications

General features

  • Supports up to 2xHPSMU, up to 2xHRSMU, and up to 8 total SMUs
  • Low-leakage switching matrix, customizable from 12 to 48 fully-guarded Kelvin outputs
  • High-frequency switching matrix with integrated pulse generator control
  • 8 auxiliary inputs and 48 extended path inputs for support of external instruments

Measurement capabilities

  • 2 microvolt and 1 femtoamp measurement resolution (HRSMU)
  • +/- 200 Volts and +/- 1 Amp output capability (HPSMU)
  • 1 kHz to 2 MHz capacitance frequency measurement range (HSCMU)
  • +/- 1.6 Amp ground unit (GNDU)

HV-SPGU option measurement capabilities

  • +/-40 V output (80 V peak-to-peak) at high impedance
  • Pulse rise and fall times as fast as 20 ns
  • Three-level output pulse capability
  • Arbitrary Linear Waveform Generation (ALWG) function

Description

The standard support period of Keysight 4070 series will be ending on November 30th, 2018.
The Extended Service Period (ESP) will extend support for 3 years until November 30th, 2021 with certain conditions and limitations.
Extended Service Period repair service is subject to the availability of parts.

The 4082A Parametric Test System is the replacement products. Learn more at Parametric Test Solutions.


The 4073B Ultra Advanced Parametric Tester enables semiconductor manufacturers to dramatically reduce test time for capacitance measurements and DC measurements in high-volume semiconductor wafer manufacturing processes. It offers up to 40 percent higher throughput than the 4073A or 4072A. The 4073B is a flexible test solution. It performs precise DC measurements, capacitance measurements, flash memory cell testing, and testing of other high-frequency applications.