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Prices for: United States

* Prices are subject to change without notice. Prices shown are Manufacturer's Suggested Retail Prices (MSRP). Prices shown are exclusive of taxes.

Key Features & Specifications

  • Beam
    • Size: 6 mm (0.24 in)
    • Separation: 11 mm (0.43 in)
  • Resolution
    • Fundamental Optical : λ/2 (316.5 nm, 12.5 µin) 
    • System Resolution: 
       - λ/64 (10 nm, 0.4 µin) based on 32x electronic resolution extension 
       - λ/512 (1.2 nm, 0.047 µin) based on 256x electronic resolution extension
  • Weight: 312 g (11 oz)
  • Required Reflector: 10767A
  • Mount used: 10785A


The Keysight 10766A Linear Interferometer is used for general purpose single axis measurements and can be employed when the interferometer is the moving component, instead of the measurement reflector. It has a rugged, thermally stable stainless steel housing.

It is optically identical to the 10702A option 001. However, the 10766A has a more robust housing and metric threads.

The 10766A requires one 10767A Linear Reflector as a reference reflector. Either a second 10767A, or the smaller and lighter 10703A is needed to complete the linear measurement optic set (note that the 55280B Linear Measurement Kit contains all required optics as well as mounting hardware). The interferometer can be used to bend the beam. It can be the moving component without any modification.

Differential operation requires removing the 10767A Linear Reflector and attaching it to the reference surface of interest.