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Product Fact Sheets
Keysight Laser Interferometer Systems Compensation Number Calculations
The Keysight Technologies, Inc. laser interferometer systems require compensation when used in an air environment. Several ways exist to obtain a compensation number (Comp Num). One is to use the Modified Edlén equation with pressure, temperature, and humidity sensors. Another is to measure an artifact with a known fixed length using a laser measurement axis and calculate a Comp Num from the raw data. A third is to track changes with a Wavelength Tracking Interferometer (WTI). Note that this method requires an initial compensation value from one of the other two methods.
Key features
Rearrange position equation¹ to calculate Initial Comp Num from artifact measurement:
Use fundamental equation twice, along with Initial Comp Num, to calculate Comp Num from WTI axis data:
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